Topology Optimized Design, Microfabrication and Characterization of Electro-Thermally Driven Microgripper
نویسندگان
چکیده
منابع مشابه
Electrostatically Driven Microgripper
In this work we report on microactuators and microgrippers fabricated from SOI (Silicon On Insulator) wafers by a surface and bulk micromachining fabrication technology. The main advantages of this technology are: a) large thickness of the devices (10 μm up to 40 μm) resulting in devices which are stable against disturbing forces perpendicular (z-direction) to the ground plate. b) the small num...
متن کاملDesign and Fabrication of Topologically Optimal Miniature Microgripper Integrated with an Electro-Thermal Microactuator
This paper presents a topological-optimization method which applies the theory of ground structure parameterization to design and analyzes a microgripper device. The study defines the compliant design domain as 2000μm×2000μm with a 200μm thickness, and discusses the effect of different optimization parameters. The driver is an electro-thermal microactuator that can actuate approximately 6000μN ...
متن کاملDesign Study for An Electro-Thermally Actuator for Micromanipulation
A new design for a polymeric microgripper was developed. Two microgrippers with different dimensions were considered. An evaluation between these models was performed using the simulation results. Finite-element analyses of the microgripper, using COVENTORWARE, are performed in order to evaluate the relation between the displacement, temperatures and the electrical current passing through the m...
متن کاملMicrofabrication of Heterogeneous, Optimized Compliant Mechanisms
Metal deposition by electroplating has been extensively used and analyzed for industrial applications, but it remains insufficiently characterized for fabricating compliant micromechanisms. This research presents a new fabrication process for heterogeneous optimized compliant mechanisms that consists of placing two materials side by side as opposed to the convention of stacking materials layer ...
متن کاملsynthesis and characterization of some macrocyclic schiff bases
ماکروسیکلهای شیف باز از اهمیت زیادی در شیمی آلی و دارویی برخوردار می باشند. این ماکروسیکلها با دارابودن گروه های مناسب در مکانهای مناسب می توانند فلزاتی مثل مس، نیکل و ... را در حفره های خود به دام انداخته، کمپلکسهای پایدار تولید نمایند. در این پایان نامه ابتدا یک دی آلدئید آروماتیک از گلیسیرین تهیه می شود و در مرحله بعدی واکنش با دی آمینهای آروماتیک و یا آلیفاتیک در رقتهای بسیار زیاد منجر به ت...
15 صفحه اولذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Intelligent Material Systems and Structures
سال: 2008
ISSN: 1045-389X,1530-8138
DOI: 10.1177/1045389x08093548